Electronics emissions control factors
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The category /business/processes/production/electronics/etchingandcvdcleaning/emissionscontrol contains data on the effect on emissions of emissions control technologies implemented in the electronics industry. This category is used a look-up reference for calculation made in the Etching and CVD cleaning methodology and cannot be used to create profile items in itself.
UID | Label |
---|---|
0O3PHCMP6B71 | c-C4F8 |
T21LG595XDAE | C2F6 |
31DOW3273ECV | C3F8 |
5TBUFRU2WPK3 | CF4 |
JYFCPQLY67WE | CHF3 |
CH3SM9EEJE7V | NF3 |
H0TZ91KPMEHG | SF6 |